Schottky field-emission scanning electron microscope with 0.9 nm SE resolution at 30 kV, 0.2–30 kV accelerating voltage, magnification to 3,000,000× and a large five-axis motorized stage.
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Description
KYKY EM-8100 High-Resolution Field-Emission SEM
The EM-8100 uses a Schottky field-emission source, low-aberration objective and beam-acceleration design for high-resolution imaging over a wide accelerating-voltage range.
| SE resolution | 0.9 nm at 30 kV |
|---|---|
| Accelerating voltage | 0.2–30 kV |
| Magnification | 1×–3,000,000×; optical navigation 1×–100× |
| Electron source | Schottky field-emission gun |
| Stage | Five-axis motorized large-specimen stage with collision warning |
| Standard imaging listed by KYKY | High-vacuum SE, chamber camera and optical navigation |
| Optional detector listed by KYKY | Four-segment semiconductor BSE |
| Options | EDS, EBSD, STEM, CL, load lock, heating, cooling and tensile stages |
Final resolution is specified at defined accelerating voltage, working distance, probe current and specimen conditions. Confirm detector package, chamber ports, stage travel, utilities, vibration and electromagnetic-site criteria, analysis software and acceptance sample.
