Start with the chamber and its gas load, then select the pump and the connecting path. A vacuum system is more than a pump catalogue number: the achievable pressure and evacuation time depend on the chamber, process, line conductance, seals, valves, ...
A mass flow meter (MFM) measures flow. A mass flow controller (MFC) adds a control valve and regulation loop to maintain a requested setpoint. Choose the function first, then match the gas, flow range, pressures, wetted materials and ...
A vacuum connection is an assembly: two mating flanges, a seal or centring ring, and the correct clamping or bolting hardware. Choosing only the nominal diameter does not establish that the joint is suitable for the required pressure, temperature or ...
Use this technical information to define your project scope, then contact LeakLab for method selection, engineering review and implementation support in your destination country.
