Pneumatically actuated ultra-high-vacuum gate valves in nominal sizes DN35–DN400. KYKY CCQ valves use CF or ISO-F flanges, magnetic position switches and a specified leak rate of ≤1.3 × 10⁻¹⁰ Pa·m³/s.
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Description
KYKY CCQ Pneumatically Actuated Ultra-High-Vacuum Gate Valves
The CCQ series uses compressed air and a solenoid directional valve to open and close a compact gate. Magnetic sensors provide open/closed feedback for automated vacuum equipment.
| Models / nominal sizes | CCQ-35B, 50B, 63B, 80A, 100A, 150A, 200A, 250A, 320B and 400B; DN35–DN400 |
|---|---|
| Standard flanges | CF or ISO-F |
| Application pressure range | 1 × 105 to 1 × 10−6 Pa |
| Specified leak rate | ≤1.3 × 10−10 Pa·m³/s |
| Drive / indication | Pneumatic / magnetic switches with open/closed indication |
| Operating air pressure | Model-dependent; current pages show 0.3–0.4 MPa for CCQ-50B and 0.4–0.5 MPa for CCQ-150A |
| Bakeout temperature | 150 °C open; 120 °C closed |
| Mounting orientation | Valve body horizontal or cylinder upward |
| Permitted media | Air and non-corrosive gases |
The legacy source page generalized 0.3–0.7 MPa, added ISO-K flanges and allowed any orientation. These details vary or conflict with current model pages and have been corrected.
Confirm air pressure for the selected DN, solenoid voltage, sensor logic, flange, seal and fail position. Use filtered dry instrument air and suitable interlocks.
