Six-position evacuation concept for removing air and moisture from cylinders before controlled high-purity gas filling. Pumping, trapping, manifold materials, valves, safety devices and acceptance pressure are engineered for the cylinder and gas service.
Description
Multi-Cylinder Evacuation System Before High-Purity Gas Filling
This system prepares cylinder interiors by evacuation before a separate, approved high-pressure filling process. The source concept uses a six-position manifold, two-stage rotary-vane pump and cryogenic trap.
| Positions | Six in the source concept |
|---|---|
| Target residual pressure | ≤1 Pa in the source concept; acceptance conditions must be specified |
| Cryogenic trap volume stated in source concept | 5 L |
| Operating pattern | Batch or shift operation, subject to pump and trap sizing |
Evacuation alone does not guarantee a final gas purity grade. Cylinder history, bakeout, purge cycles, moisture analysis, manifold cleanliness, leak tightness and the quality of the source gas all affect purity.
The former page mentioned filling to 150 atm, but a vacuum manifold must not be assumed safe for high-pressure filling. Any shared high-pressure section requires pressure-rated components, relief protection, gas-specific cleaning, formal hazard review and conformity with the rules at the installation site.
