Magnetron sputter-coating platform for conductive films on SEM specimens, including heat-sensitive polymers, biomaterials, composites and powders. Target, power supply, pumping, thickness control and specimen stage are configuration-dependent.
Description
SBC-16 Magnetron Sputter Coating System
The SBC-16 source record describes a magnetron coating system for preparing non-conductive or beam-sensitive SEM specimens. Magnetron operation can provide stable deposition at lower specimen heating than some conventional sputter arrangements, subject to the selected process.
Configuration data to confirm
- DC, pulsed-DC or RF power and compatible target materials
- Target diameter, purity, backing plate and cooling
- Base pressure, working pressure and argon-flow control
- Specimen-stage size, rotation, tilt and maximum height
- Thickness monitor, recipe control and endpoint method
- Pump type, exhaust, utilities and safety interlocks
No current manufacturer specification page matching all claims in the legacy source description was located during this revision. Performance and included equipment must therefore be taken from the approved supplier quotation rather than inferred from the model name.
