Compact DC ion sputter coater for conductive SEM sample coatings. KYKY lists a two-stage direct-drive rotary-vane pump, Pirani vacuum measurement, air or argon process gas and a 100 × 130 mm chamber.
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Description
KYKY SBC-12 Compact Ion Sputter Coater
The SBC-12 applies thin conductive films to non-conductive specimens before SEM imaging. KYKY lists targets including gold, platinum, chromium, silver, titanium, copper, nickel and gold-palladium alloy.
| Vacuum system | Two-stage direct-drive rotary-vane pump |
|---|---|
| Vacuum measurement | Pirani gauge |
| Ion-current adjustment | Fine gas-admission valve |
| Process gas | Air or argon |
| Chamber | 100 mm internal diameter × 130 mm |
| Small stage | 40 mm diameter, up to six specimen cups |
| Large stage | 60 mm diameter |
| Gold target size | 58 mm diameter |
Coating rate and thickness depend on target material, current, pressure, distance and time. Confirm target purity and backing plate, pump, power, chamber seals, specimen holders, thickness monitoring and local exhaust or gas-supply requirements.
