MEMS-based AS200 gas mass flow controller for compatible air, nitrogen, oxygen, argon and carbon-dioxide configurations. Product-title ranges: 3, 5, 10, 20 and 30 L/min. Available interfaces stated in the source record include RS-485, EtherCAT and analog signals. Confirm the selected gas, full-scale range, calibration, fittings and communications option before ordering.
Description
AS200 Digital Gas Mass Flow Controller
The AS200 measures and controls the mass flow of a configured clean gas using a MEMS sensing element and an integrated control valve. Available configurations described in the source record include air, nitrogen, oxygen, argon and carbon dioxide.
The product title identifies full-scale ranges of 3, 5, 10, 20 and 30 L/min. The broader source description also refers to versions up to 300 SLM. The exact model, gas and calibrated range must therefore be confirmed for each order.
| Configured gases | Air, N2, O2, CO2 and Ar options |
|---|---|
| Accuracy stated in source record | ±1.0% of set point or ±0.35% of full scale, depending on operating region and model |
| Repeatability | ±0.2% full scale |
| Response time | ≤1 s |
| Required pressure differential | 0.05 to 0.45 MPa, depending on configuration |
| Interfaces | RS-485, EtherCAT and analog options stated in source record |
| Analog signals | 1–5 V or 4–20 mA options stated in source record |
| Supply | +15 to +28 V DC |
| Typical power consumption | Approximately 2 W |
| External helium leak rate stated in source record | ≤1 × 10−9 Pa·m3/s |
| Body material | 304 stainless steel |
| Operating temperature | +5 to +45 °C |
| Weight range stated in source record | 0.95 to 2.56 kg |
Applications
Typical uses include vacuum and gas-analysis equipment, laboratory gas delivery, semiconductor processes, chemical systems and other automated processes requiring controlled clean-gas flow. Suitability for oxygen, medical, pharmaceutical or safety-related service must be confirmed specifically; the listing alone does not establish the required approvals.
The source configuration includes a connection cable, product documentation, packaging and instructions. Horizontal installation is recommended; vertical installation may require zero adjustment. Confirm the calibrated gas and reference conditions, range, accuracy basis, pressure differential, fittings, elastomers, wetted materials, signal protocol, connector, calibration certificate and scope of supply before ordering.
