MEMS-based AS200B and AS200L digital gas mass flow controllers for configured clean, dry, non-corrosive gases. AS200B is stated for up to 50 SLM; AS200L versions cover 100, 200 and 300 SLM. RS-485 and 1–5 V or 4–20 mA signal options are available. Confirm the exact model, gas, range, pressure and connection before ordering.
Description
ASAIR AS200B / AS200L Gas Mass Flow Controller
The AS200B and AS200L are MEMS-based mass flow controllers for configured clean, dry and non-corrosive gases such as air, nitrogen, oxygen, carbon dioxide and argon. The aluminum-alloy body reduces weight, while digital and analog interfaces support integration into automated systems.
| Models | AS200B / AS200L |
|---|---|
| Full-scale ranges | Up to 50 SLM for AS200B; 100, 200 and 300 SLM for AS200L |
| Accuracy stated in source record | ±1.0% of reading above 35% full scale; ±0.35% full scale below 35% |
| Linearity | ±0.5% full scale |
| Repeatability | ±0.2% full scale |
| Response time | 1 s for AS200B; ≤2 s for AS200L |
| Maximum pressure stated in source record | 0.45 MPa for AS200B; 3 MPa for AS200L |
| Working-pressure guidance | 0.2–0.35 MPa for 100/200 SLM; 0.35–0.45 MPa for 300 SLM |
| External helium leak rate | <1 × 10−10 Pa·m3/s |
| Operating temperature | +5 to +45 °C |
| Body material | Aluminum alloy |
| Supply | +15 to +28 V DC |
| Signals | RS-485, 1–5 V or 4–20 mA options |
| Weight | 0.95 kg for AS200B; 2.8 kg for AS200L |
| Connection options | 1/4 in VCR, 1/4 in compression and 3/8 in compression |
Applications include gas-distribution systems, CVD and epitaxy equipment, analytical instruments, microreactors and other automated gas-dosing processes. Application-specific materials, cleanliness, oxygen compatibility and approvals must be confirmed.
Confirm the exact model, calibrated gas, reference conditions, range, pressure rating, required pressure differential, fittings, seal materials, signals, connector, protocol documentation and calibration certificate before ordering. Dimensional drawings are available for selection of the mounting arrangement.
AS200B application guide
For gas selection, pressure differential, control-loop operation and automation checks, read the AS200B mass flow control application guide.
