Triode sputter ion pump for clean ultra-high-vacuum systems. The 3L-400C provides a nominal air pumping speed of 420 L/s and argon pumping speed of 85 L/s, with a DN150CF inlet and a stated ultimate pressure of 1 × 10−8 Pa.
Description
KYKY 3L-400C Sputter Ion Pump
The 3L-400C is a magnetically confined triode sputter ion pump for clean, oil-free ultra-high-vacuum systems. Typical applications include surface-analysis instruments, accelerators, electron and ion-beam equipment, vacuum coating systems and research chambers.
| Nominal pumping speed for air | 420 L/s |
|---|---|
| Nominal pumping speed for argon | 85 L/s |
| Stated ultimate pressure | 1 × 10−8 Pa |
| Maximum starting pressure | 5 × 10−4 Pa |
| High-voltage supply | −5 kV |
| Inlet flange | DN150CF |
| Electrode units | 4 |
| Maximum bakeout temperature | 200 °C with magnets; 300 °C without magnets |
| Approximate dimensions | 500 × 265 × 600 mm |
| Approximate weight | 153 kg |
System Integration
An ion pump requires a compatible high-voltage controller and a separate roughing/high-vacuum system to reach the permitted starting pressure. Cable, controller, interlocks, mounting orientation, bakeout procedure and magnetic-field clearances must be engineered for the installation.
The original source record had an inconsistent model name: its title referred to a 3L-25 pump, while its technical content described the 3L-400C. This English card follows the 3L-400C model and 420 L/s specification. Confirm the current manufacturer datasheet, flange drawing, controller and exact supply scope before ordering.
