KYKY 3L-100 triode sputter-ion pump for clean ultra-high vacuum systems. Nitrogen pumping speed: 110 L/s; argon pumping speed: 24 L/s; ultimate pressure: 7 × 10⁻⁸ Pa. Triode construction improves inert-gas pumping compared with the corresponding diode configuration. Confirm the controller and complete scope before ordering.
Description
KYKY 3L-100 Triode Sputter-Ion Pump
The 3L-100 is an oil-free triode ion pump for ultra-high vacuum systems. Its triode electrode arrangement is intended to improve inert-gas pumping while retaining the low vibration and clean operation of a sputter-ion pump.
| Nitrogen pumping speed | 110 L/s |
|---|---|
| Argon pumping speed | 24 L/s |
| Ultimate pressure | 7 × 10−8 Pa |
| Maximum start pressure | ≤5 × 10−4 Pa |
| Inlet flange | DN150CF |
| Working voltage | −5 kV |
| Electrode units | 4 |
| Maximum bakeout temperature | <200 °C with magnets / <300 °C without magnets |
| Dimensions | 350 × 250 × 307 mm |
| Weight | 38 kg |
Use a suitable preliminary vacuum system, short high-conductance connections and controlled bakeout. Actual chamber pressure depends on gas load, conductance, surface preparation and instrumentation.
Confirm the current manufacturer datasheet, controller, high-voltage cable, magnets, flange and included accessories before ordering.
