Integrated dry pump for evacuation from atmospheric pressure to high vacuum without a separate backing pump. The JZB-63/180 provides a peak pumping speed of approximately 175 m³/h, an LF63 inlet and a KF25 exhaust.
Description
CBVAC JZB-63/180 Direct-Atmosphere High-Vacuum Dry Pump
The JZB-63/180 combines multiple dry pumping stages in one unit and can start at atmospheric inlet pressure. It is intended for load locks, transfer chambers and clean processes where an oil-sealed backing pump is undesirable.
| Peak pumping speed | 175 m³/h, approximately 49 L/s |
|---|---|
| Ultimate pressure | ≤1 × 10−4 mbar, approximately 1 × 10−2 Pa |
| Inlet / exhaust | LF63 / KF25 |
| Rotor support | Grease-lubricated ceramic ball bearings |
| Cooling | Water, >2 L/min, 15–35 °C, 0.2–0.7 MPa in the source data |
| Power | Three-phase 200–240 V AC, 50/60 Hz; 380 V versions listed |
| Nominal input power | Approximately 1.4 kW |
| Control | Remote I/O or RS-232 stated in the source product data |
| Mounting / weight | Vertical / approximately 45 kg |
The model class is often rounded to 180 m³/h; the technical value used here is 175 m³/h. “Dry” describes the pumped-gas path and does not mean the rotor bearings contain no lubricant.
Confirm L/LE/Twin suffix, mains voltage, nitrogen-purge option, interface, cooling-water quality and process-gas compatibility. Use cooling, vibration, current and temperature interlocks.
