Integrated pump for evacuation from atmospheric pressure to below 1 × 10⁻² Pa without a separate backing pump. The source product record lists 170 m³/h peak speed, ISO-K63 inlet, KF25 exhaust and vertical installation.
Description
KYKY ZF180L Direct-Atmosphere High-Vacuum Pump
The ZF180L is presented in the cloned source catalog as an integrated pump for clean load-lock, coating, plasma and research systems. It combines the atmospheric-to-high-vacuum pressure range in one unit.
| Maximum pumping speed | 170 m³/h in the source product record |
|---|---|
| Ultimate pressure | <1 × 10−2 Pa |
| Inlet / exhaust | ISO-K63 / KF25 |
| Ambient temperature | 5–40 °C |
| Noise / vibration | <59 dB(A) / <0.2 g in the source record |
| Mounting | Vertical, inlet upward, maximum operating tilt 5° |
| Lubricant stated in source record | Fomblin 6/6 |
| Enclosure / warm-up | IP44 / approximately 30 min |
| Power | Three-phase 200/208 V AC ±10%, 47–63 Hz |
| Nominal / maximum input power | 1.3 / 3 kW |
| Weight | Approximately 43.5 kg |
The source page called the pump oil-free while also specifying Fomblin lubricant. It is more accurate to describe the pumping path as hydrocarbon-free subject to the exact internal design; the pump is not literally lubricant-free.
Confirm the current manufacturer datasheet, electrical variant, cooling, interlock, exhaust limit, gas compatibility and maintenance procedure. No claim of authorized LeakLab representation is made.
