High-throughput integrated dry pump for evacuation from atmospheric pressure to high vacuum without a separate backing pump. The supported CBVAC inventory model is JZB-160/500, rated in the 500 m³/h class with an LF160 inlet.
Description
CBVAC JZB-160/500 Direct-Atmosphere High-Vacuum Dry Pump
The JZB-160/500 combines dry pumping stages in a single unit for load locks, coating equipment and other clean vacuum processes. It can evacuate directly from atmospheric inlet pressure.
| Pumping-speed class | 500 m³/h |
|---|---|
| Ultimate-pressure class stated in the source record | Approximately 1 × 10−4 Pa |
| Supported catalog model / inlet | JZB-160/500 / LF160 |
| Exhaust | KF25 in the source record |
| Cooling | Water, ≥2 L/min, 15–35 °C, 0.2–0.7 MPa in the source record |
| Power | Three-phase 200–240 V AC; 380 V versions listed |
| Nominal / maximum power stated in source record | Approximately 1.6 / 3 kW |
| Nominal / standby rotor speed stated in source record | Approximately 18,000 / 6,000 rpm |
| Mounting / weight | Vertical / approximately 47 kg |
The legacy source page called the product JZB-63/500, while the supported CBVAC inventory and comparison table identify the 500 m³/h model as JZB-160/500. This page uses the supported designation and does not invent a DN63 version.
Confirm current ultimate-pressure test conditions, L/LE suffix, voltage, purge, controller interface, cooling and permitted gases from the manufacturer datasheet before selection.
