Heated capacitance diaphragm gauge for absolute-pressure measurement in thermally demanding processes. MM1 configurations are described with 0.1 to 1000 Torr full scales, ±0.25% accuracy, 45 °C, 100 °C or 120 °C temperature control and a linear 0–10 V output.
Description
CBVAC MM1 High-Temperature Capacitance Diaphragm Gauge
The MM1 is a heated absolute-pressure transducer for processes where temperature control helps limit condensation and zero drift. The capacitance diaphragm principle is gas-species-independent, but process compatibility still depends on wetted materials and chemistry.
| Available full-scale range family | Selected ranges from 0.1 to 1000 Torr |
|---|---|
| Accuracy stated in source record | ±0.25% of reading under applicable 45–100 °C conditions |
| Resolution | 0.001% of full scale |
| Response time | <20 ms |
| Heater setpoint options | 45 °C, 100 °C or 120 °C, depending on version |
| Analog output | 0–10 V DC; load ≥10 kΩ |
| Supply options stated in source record | ±15 V DC ±5% or optional 24 V DC |
| Process connections | KF16, KF25, CF16, CF35, VCR and 1/2-inch tube options stated in source record |
| Maximum overpressure stated in source record | 310 kPa |
| Wetted material stated in source record | High-purity nickel alloy |
| Storage temperature stated in source record | −25 to +75 °C |
A 120 °C heater setpoint is not the same as permission for every external environment or process-gas temperature. Verify thermal clearances, cable rating, flange heating, insulation and allowable ambient conditions for the exact version.
Confirm full scale, heater setpoint, accuracy conditions, wetted materials, fitting, supply, connector, warm-up, zeroing and calibration documentation before ordering.
