Compact oil-free 2L-50 diode sputter-ion pump with a nitrogen pumping speed of 65 L/s and stated ultimate pressure of ≤7 × 10⁻⁸ Pa. Intended for small high-vacuum chambers and local vacuum modules. Confirm the complete configuration before ordering.
Description
2L-50 Diode Sputter-Ion Pump
The 2L-50 is a small oil-free ion pump for compact chambers and local high-vacuum modules. With no rotating parts, it produces no mechanical pump vibration and avoids hydrocarbon backstreaming from an oil-based pumping mechanism.
| Nitrogen pumping speed | 65 L/s |
|---|---|
| Argon pumping speed | Approximately 0.6 L/s |
| Ultimate pressure | ≤7 × 10−8 Pa |
| Maximum start pressure | ≤5 × 10−4 Pa |
| Inlet flange | CF100 |
| Maximum bakeout temperature | <200 °C with magnets / <300 °C without magnets |
| Bakeout jacket | Not included in the stated configuration |
| High-voltage power supply | Included in the source configuration |
| Indicative dimensions | Approximately 290 × 120 × 299 mm |
| Indicative weight | Approximately 22 kg |
Use an appropriate preliminary vacuum stage and clean, short CF connections. Final pressure depends on system gas load, conductance, bakeout and measurement method.
Confirm the current datasheet, high-voltage polarity, controller, cable, magnets, flange and scope of supply before ordering. LeakLab commissioning and leak-testing support are available subject to an agreed scope.
