Active-magnetic-bearing turbomolecular pump with a nominal nitrogen pumping speed of 1,280 L/s. The CXF-200/1401 has a DN200 ISO-F standard inlet, KF40 foreline connection, water cooling and optional barrier-gas protection for clean high-vacuum processes.
Description
KYKY CXF-200/1401 Magnetically Levitated Turbomolecular Pump
The CXF-200/1401 uses active magnetic bearings to support the rotor without mechanical bearing contact. It is intended for coating, etching, semiconductor, research and other high-vacuum systems where low vibration and a lubricant-free bearing system are important.
| Pumping speed: N₂ / Ar / He / H₂ | 1,280 / 1,100 / 880 / 560 L/s |
|---|---|
| Compression ratio: N₂ and Ar / He / H₂ | >1 × 108 / >1 × 104 / >1 × 103 |
| Ultimate pressure | 1 × 10−7 Pa with elastomer seal; 1 × 10−8 Pa stated for applicable metal-sealed configuration |
| Main inlet | DN200 ISO-F standard; DN200 CF optional; DN200 LF custom |
| Foreline / optional barrier-gas ports | KF40 / KF10 |
| Recommended nitrogen barrier flow | 20 sccm |
| Nominal rotor speed | 30,000 rpm |
| Acceleration / stopping time | ≤6 min / ≤8 min |
| Cooling | Water, 2 L/min, recommended 20 ±5 °C |
| Supply | 220 V AC ±10%, 50 Hz or 110 V AC ±10%, 60 Hz |
| Compatible power/controller unit | CXFD-1001 in current KYKY product data; confirm exact supply scope |
| Mounting / weight | Any orientation / approximately 51 kg |
Confirm inlet seal, power unit, cables, cooling kit, barrier-gas option, backing-pump size and interface protocol. Ultimate pressure is conditional on seal type, cleanliness, bakeout, conductance and backing performance.
Use interlocked cooling, backing pressure, rotor speed and controlled venting. Protect the high-energy rotor from shock, particles and sudden gas inrush.
