Active-magnetic-bearing turbomolecular pump with a nominal nitrogen pumping speed of 2,950 L/s. The CXF-320/3001 uses a DN320 ISO-F inlet, KF40 foreline connection, water cooling and optional nitrogen barrier gas for large high-vacuum systems.
Description
KYKY CXF-320/3001 Magnetically Levitated Turbomolecular Pump
The CXF-320/3001 is a large DN320 active-magnetic-bearing pump for high-throughput coating, research and industrial vacuum systems.
| Pumping speed: N₂ / Ar / He / H₂ | 2,950 / 2,750 / 2,300 / 1,100 L/s |
|---|---|
| Compression ratio: N₂ and Ar / He / H₂ | >1 × 108 / >1 × 104 / >1 × 103 |
| Ultimate pressure | 1 × 10−7 Pa for the stated elastomer-sealed DN320 ISO-F version |
| Main inlet / foreline | DN320 ISO-F / KF40 |
| Optional barrier-gas port and flow | KF10; 50 sccm nitrogen |
| Maximum continuous foreline pressure stated in source record | 2,100 Pa |
| Nominal rotor speed | 21,000 rpm |
| Acceleration / stopping time | ≤9 min / ≤12 min |
| Cooling | Water, ≥3 L/min, 10–25 °C |
| Supply | 220 V AC ±10%, 50 Hz or 110 V AC ±10%, 60 Hz |
| Mounting / weight | Any orientation / approximately 76 kg |
The source title claimed 1 × 10−8 Pa, but the detailed source table states that a metal-sealed version is not applicable and gives 1 × 10−7 Pa for the elastomer-sealed configuration. This English page uses the supported value.
Confirm controller, cables, cooling, purge, backing pump, interface and allowed process gases. Use safe lifting and interlocked backing, cooling, speed and vent control.
