Active-magnetic-bearing turbomolecular pump with a nominal nitrogen pumping speed of 1,400 L/s. The CXF-200/1402 uses a DN200 ISO-F standard inlet, KF40 foreline connection, water cooling and optional nitrogen barrier gas.
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Description
KYKY CXF-200/1402 Magnetically Levitated Turbomolecular Pump
The CXF-200/1402 is the higher-throughput DN200 model in the stated CXF pair. Active magnetic suspension eliminates mechanical bearing contact and supports low-vibration high-vacuum operation.
| Pumping speed: N₂ / Ar / He / H₂ | 1,400 / 1,300 / 1,100 / 820 L/s |
|---|---|
| Compression ratio: N₂ and Ar / He / H₂ | >1 × 108 / >1 × 104 / >1 × 103 |
| Ultimate pressure | 1 × 10−7 Pa with elastomer seal; 1 × 10−8 Pa stated for applicable metal-sealed configuration |
| Main inlet | DN200 ISO-F standard; DN200 CF optional; DN200 LF custom |
| Foreline / optional barrier-gas ports | KF40 / KF10 |
| Recommended nitrogen barrier flow | 20 sccm |
| Maximum continuous foreline pressure stated in source record | 1,200 Pa |
| Nominal rotor speed | 33,000 rpm |
| Acceleration / stopping time | ≤7 min / ≤9 min |
| Cooling | Water, ≥2 L/min, 10–25 °C |
| Supply | 220 V AC ±10%, 50 Hz or 110 V AC ±10%, 60 Hz |
| Mounting / weight | Any orientation / approximately 51 kg |
Confirm the current controller designation, inlet seal, cables, cooling, purge, backing pump and interface. Process-gas compatibility and maximum throughput depend on the exact version.
Provide pressure, cooling, speed and vent interlocks and protect the rotor from shock, particles and abrupt venting.
