Active-magnetic-bearing turbomolecular pump with a nominal nitrogen pumping speed of 2,150 L/s. The CXF-250/2301 has a DN250 ISO-F standard inlet, KF40 foreline connection, water cooling and an optional nitrogen barrier-gas port.
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Description
KYKY CXF-250/2301 Magnetically Levitated Turbomolecular Pump
The CXF-250/2301 is a DN250 magnetic-bearing turbomolecular pump for large coating, deposition, research and process chambers. Active rotor control supports contact-free bearing operation.
| Pumping speed: N₂ / Ar / He / H₂ | 2,150 / 1,900 / 1,500 / 850 L/s |
|---|---|
| Compression ratio: N₂ and Ar / He / H₂ | >1 × 108 / >1 × 104 / >1 × 103 |
| Ultimate pressure | 1 × 10−7 Pa with elastomer seal; 1 × 10−8 Pa stated for applicable metal-sealed configuration |
| Main inlet | DN250 ISO-F standard; DN250 CF optional; DN250 LF custom |
| Foreline / optional barrier-gas ports | KF40 / KF10 |
| Recommended nitrogen barrier flow | 50 sccm |
| Maximum continuous foreline pressure stated in source record | 1,300 Pa |
| Nominal rotor speed | 27,000 rpm |
| Acceleration / stopping time | ≤8 min / ≤11 min |
| Cooling | Water, ≥3 L/min, 10–25 °C |
| Supply | 220 V AC ±10%, 50 Hz or 110 V AC ±10%, 60 Hz |
| Mounting / weight | Any orientation / approximately 60 kg |
Confirm the CXF-2301 controller, exact flange, cables, cooling, barrier-gas kit, backing pump and control interface. Effective pumping speed at the chamber is limited by conductance.
Use safe lifting, rigid aligned mounting and interlocked backing, cooling, speed and vent sequences.
