Water-cooled dry vacuum pump system with a nominal pumping speed of 1,200 m³/h and a stated ultimate pressure of 0.5 Pa. The SSH1220H provides nitrogen purge capability, RS-485 communication and remote I/O for high-throughput process vacuum.
Description
CBVAC SSH1220H Dry Vacuum Pump System
The SSH1220H is a high-throughput dry pumping system with two controlled drive stages, water cooling and nitrogen purge. It is intended for engineered industrial installations rather than stand-alone use without utilities and controls.
| Nominal pumping speed | 1,200 m³/h (20,000 L/min) |
|---|---|
| Stated ultimate pressure | 0.5 Pa |
| Electrical supply | Three-phase 380/220 V, 50/60 Hz |
| Installed drive power | 3.9 + 5.5 kW |
| Stated operating power | Approximately 0.5 + 2.5 kW at the specified condition |
| Inlet / exhaust | VG100 / KF40 |
| Cooling water stated in source record | 4–8 L/min, 0–25 °C, 3–5 kgf/cm²; Rc 3/8-inch connection |
| Nitrogen purge stated in source record | 0.1–0.2 MPa; 12–100 L/min; 1/4-inch tube connection |
| Control | RS-485 and remote I/O |
| Noise | ≤75 dB(A) |
| Dimensions / weight | Approximately 930 × 400 × 800 mm / 350 kg |
| Source ordering reference | 4.5.A5007; confirm current part number |
Confirm gas load, duty cycle, pumping curve, purge and seal-gas configuration, cooling, power, exhaust treatment and control interface. System performance at the chamber depends on line conductance and process conditions.
Interlock cooling flow, exhaust pressure, drive temperature and purge where required. Hazardous gases require compatible materials and approved abatement.
