Configurable high-vacuum unit based on the JFB-100/301 turbomolecular pump. The high-vacuum stage provides 300 L/s for nitrogen and is available with LF/ISO-K or CF inlet configurations.
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Description
CBVAC JFJ-301 High-Vacuum Pumping Unit
The JFJ-301 combines a JFB-100/301 turbomolecular pump with application-specific backing, isolation, measurement and control equipment.
| High-vacuum pump | CBVAC JFB-100/301 |
|---|---|
| Pumping speed | 300 L/s nitrogen; 230 L/s helium |
| Ultimate pressure of turbopump stage | ≤5 × 10−7 Pa CF; ≤5 × 10−6 Pa LF/ISO-K under stated conditions |
| Main inlet | DN100 LF/ISO-K or CF100 |
| Foreline / recommended backing speed | KF25, with KF40 option stated / 2–6 L/s |
| Turbopump control | Integrated 48 V DC or external 220 V AC controller; RS-485 Modbus RTU |
| Cooling | Air or water depending on load |
| Approximate unit weight | 36–47 kg in the current inventory, configuration-dependent |
Confirm the exact unit code, backing pump, valves, gauge, controller, frame, cooling and interface. Effective chamber speed and pressure depend on conductance, leaks, outgassing and backing performance.
