Configurable high-throughput pumping unit based on the JFB-160/701 turbomolecular pump. The detailed source specification gives 650 L/s for nitrogen and 550 L/s for helium.
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Description
CBVAC JFJ-701 High-Vacuum Pumping Unit
The JFJ-701 is a DN160 pumping unit for medium-size research and process chambers. It combines a JFB-160/701 high-vacuum stage with a selected backing pump, valves, measurement and control equipment.
| High-vacuum pump | CBVAC JFB-160/701 |
|---|---|
| Pumping speed | 650 L/s nitrogen; 550 L/s helium |
| Ultimate pressure of turbopump stage | <5 × 10−7 Pa CF; <5 × 10−6 Pa LF/ISO-K |
| Main inlet | DN160 LF/ISO-K or CF160 |
| Recommended backing-pump speed | 4–10 L/s |
| Turbopump controller | JFB-III or JFB-III-B, 220 V AC; RS-485 and logic I/O |
| Cooling | Air or water; source water value ≥1.5 L/min at 15–30 °C |
| Approximate unit weight | 70–100 kg in current JFJ-701/1401 inventory, configuration-dependent |
The 701 designation is a product class; the detailed source table states 650 L/s for nitrogen. Confirm backing pump, flange, gauge, valve, controller and cooling by unit ordering code.
