DN100 turbomolecular pump with grease-lubricated ceramic ball bearings and a nominal nitrogen pumping speed of 250 L/s. LF and CF inlet versions, integrated or external controllers, RS-485 communication and air or water cooling support instrument and process integration.
Description
CBVAC JFB-100/251 Turbomolecular Pump
The JFB-100/251 is a compact DN100 turbomolecular pump for high-vacuum instruments and process chambers. A grease-lubricated ceramic ball-bearing system supports the rotor; controller and flange configuration are selected for the installation.
| Nominal pumping speed | 250 L/s for nitrogen; approximately 200 L/s for helium in the source record |
|---|---|
| Ultimate pressure | Down to 5 × 10−7 Pa with CF inlet; approximately 5 × 10−6 Pa with LF/ISO-K inlet |
| Compression ratio | Approximately 1 × 108 for nitrogen and 1 × 106 for helium in the source record |
| Main inlet | DN100 LF/ISO-K or CF100 |
| Foreline connection | KF25 or KF40, configuration-dependent |
| Recommended backing pump | 1–4 L/s in the source record |
| Controller options | Integrated JFB-II-G3 with 24 V DC input or external JFD-II with 220 V AC input |
| Interfaces | RS-485 Modbus RTU and DB15 logic I/O, controller-dependent |
| Cooling | Air or water; cooling requirements depend on gas throughput and ambient conditions |
| Approximate weight | 6.0 kg LF, 7.9 kg CF; double-flow version approximately 6.5 kg in current product data |
Confirm the exact flange, ordering code, foreline limit, rotor speed, controller, cable, cooling accessory, purge port and installation orientation. Performance at the chamber depends on conductance, gas species, outgassing, leak tightness and backing pressure.
Use pressure and speed interlocks, controlled venting and particle protection. Do not move the pump while the rotor is spinning.
