DN160 turbomolecular pump with 400 L/s nitrogen and 320 L/s helium pumping speed. LF and CF inlet versions, ceramic ball-bearing rotor support, RS-485 control and air or water cooling serve coating, analytical and research vacuum systems.
Description
CBVAC JFB-160/401 Turbomolecular Pump
The JFB-160/401 is a DN160 turbomolecular pump with grease-lubricated ceramic ball bearings. It is designed for high-vacuum chambers requiring higher conductance than the DN100 family.
| Pumping speed | 400 L/s for nitrogen; 320 L/s for helium |
|---|---|
| Ultimate pressure | ≤5 × 10−7 Pa with CF inlet; ≤5 × 10−6 Pa with LF/ISO-K inlet |
| Compression ratio | 1 × 1010 for nitrogen; 5 × 103 for helium |
| Main inlet | DN160 LF/ISO-K or CF160 |
| Foreline connection | KF40 |
| Recommended backing pump | 3–8 L/s |
| Maximum continuous inlet pressure | 10 Pa for nitrogen; 3 Pa for helium in the source record |
| Nominal rotor speed | Approximately 36,000 rpm |
| Acceleration time | ≤5 min |
| Controller supply | 48 V DC integrated version or 220 V AC external-controller version |
| Interfaces | RS-485 Modbus RTU and DB15 logic I/O |
| Cooling | Air or water |
| Approximate weight | 10–11 kg LF; approximately 12 kg CF depending on revision |
Confirm ordering code, flange, controller, cable, cooling, purge option, magnetic-field limits and mounting orientation. System pressure and effective speed depend on chamber conductance, leaks, outgassing, process gas and backing performance.
Use interlocked start, cooling and vent sequences. Prevent particles, condensate, shock and sudden air inrush.
