DN100 turbomolecular pump with 300 L/s nitrogen and 230 L/s helium pumping speed. CF and LF inlet versions, grease-lubricated ceramic ball bearings, integrated or external control, Modbus RTU and air or water cooling support high-vacuum systems.
Description
CBVAC JFB-100/301 Turbomolecular Pump
The JFB-100/301 is a DN100 high-vacuum turbomolecular pump with a grease-lubricated ceramic ball-bearing rotor support. Integrated and external-controller versions are available.
| Pumping speed | 300 L/s for nitrogen; 230 L/s for helium |
|---|---|
| Ultimate pressure | ≤5 × 10−7 Pa with CF inlet; ≤5 × 10−6 Pa with LF/ISO-K inlet |
| Compression ratio | >1 × 1010 for nitrogen; >5 × 103 for helium |
| Main inlet | DN100 LF/ISO-K or CF100 |
| Foreline connection | KF25; KF40 option stated in source record |
| Recommended backing pump | 2–6 L/s |
| Maximum continuous foreline pressure | 300 Pa for nitrogen; 200 Pa for helium |
| Nominal rotor speed | 48,300 rpm |
| Acceleration time | ≤5 min |
| Controller supply | 48 V DC integrated version or 220 V AC external-controller version |
| Communications | RS-485, Modbus RTU |
| Cooling | Natural convection, air or water, depending on load |
| Approximate weight | 9.6 kg LF; 10 kg CF |
Confirm the ordering code, inlet and foreline flanges, controller, cable, water-cooling set, purge option, permitted magnetic field and mounting orientation. Ultimate pressure is a test-condition value, not a guaranteed chamber pressure.
Integrate pressure, cooling and speed interlocks; protect the pump from particles, shock, sudden venting and operation above the permitted backing pressure.
