DN250 turbomolecular pump with 2,050 L/s nitrogen and 1,800 L/s helium pumping speed in the source technical table. LF and CF inlet versions, Modbus control, grease-lubricated ceramic ball bearings and air or water cooling support large process chambers.
Description
CBVAC JFB-250/2201 Turbomolecular Pump
The JFB-250/2201 is a DN250 high-throughput turbomolecular pump with grease-lubricated ceramic ball bearings. LF/ISO-K and CF configurations address different cleanliness and ultimate-pressure requirements.
| Pumping speed | 2,050 L/s for nitrogen; 1,800 L/s for helium |
|---|---|
| Ultimate pressure | <5 × 10−7 Pa with CF inlet; <5 × 10−6 Pa with LF/ISO-K inlet |
| Compression ratio | 1 × 1010 for nitrogen; 1 × 104 for helium |
| Main inlet | DN250 LF/ISO-K or CF250 |
| Foreline connection | DN40 ISO-KF; optional KF50 stated in source record |
| Recommended backing pump | 16–24 L/s |
| Maximum continuous foreline pressure | 200 Pa for nitrogen; 100 Pa for helium |
| Nominal / standby rotor speed | 24,000 / 16,800 rpm |
| Supply and maximum power | 220 V AC ±10%, 50/60 Hz; up to 1,000 W |
| Interfaces | RS-485 Modbus RTU, DB15 and local controls |
| Cooling | Air or water; source water specification ≥1.5 L/min at 15–25 °C |
| Approximate weight | 40 kg LF; 45 kg CF |
The model is commonly described as a 2200 L/s class pump, while the detailed source table states 2,050 L/s for nitrogen. Confirm the current guaranteed speed, controller, flange, cable, purge and cooling set by ordering code.
Rigid aligned mounting, guarded lifting, pressure-based start logic, cooling interlocks and controlled venting are required.
