Magnetic-bearing turbomolecular pump with an integrated controller and 2,200 L/s nitrogen pumping speed. The MTP-2201 uses an ISO250F inlet, KF40 foreline connection, water cooling, optional TMS temperature management and nitrogen purge.
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Description
CBVAC MTP-2201 Magnetically Levitated Turbomolecular Pump
The MTP-2201 is a magnetic-bearing high-vacuum pump with an integrated controller for large process chambers. Water cooling, purge and temperature-management options support demanding gas-load conditions.
| Pumping speed: N₂ / Ar / H₂ | 2,200 / 1,900 / 1,700 L/s |
|---|---|
| Ultimate pressure | ≤1 × 10−7 Pa under stated conditions |
| Compression ratio: N₂ / H₂ | >1 × 108 / >1 × 104 |
| Main inlet / foreline | ISO250F / KF40 |
| Nominal / standby rotor speed | 27,000 / approximately 5,000 rpm |
| Acceleration / stopping time | <8 min / <11 min |
| Recommended backing-pump speed | >1,300 L/min in the source record |
| Inlet-flange degassing temperature | <120 °C |
| Cooling | Water; TMS supported depending on configuration |
| Enclosure / mounting | IP54 / any orientation |
| Nitrogen purge | 50 ±10 sccm |
| Approximate weight | 62 kg |
Confirm controller firmware, mains supply, cable, cooling-water requirements, TMS hardware, purge kit, backing pump, interface and exact inlet seal. “TMS supported” does not mean it is included.
Use safe lifting and interlocked backing, cooling, rotor-speed, purge and vent sequences.
