Magnetic-bearing turbomolecular pump with an integrated controller and 3,200 L/s nitrogen pumping speed. The MTP-3201 uses an ISO320F inlet, KF40 foreline connection, water cooling, optional TMS temperature management and nitrogen purge.
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Description
CBVAC MTP-3201 Magnetically Levitated Turbomolecular Pump
The MTP-3201 is a large magnetic-bearing turbomolecular pump for process and research vacuum systems. The integrated controller manages rotor suspension, speed and protection functions.
| Pumping speed: N₂ / H₂ | 3,200 / 2,300 L/s |
|---|---|
| Ultimate pressure | ≤1 × 10−7 Pa under stated conditions |
| Compression ratio: N₂ / H₂ | >1 × 108 / >2 × 103 |
| Main inlet / foreline | ISO320F standard, ISO250F or VG350 options stated / KF40 |
| Supply / maximum input power | Single-phase 176–264 V AC, 50/60 Hz / 1,800 W |
| Nominal rotor speed | 27,720 rpm |
| Acceleration / stopping time | ≤10 min / ≤16 min |
| Recommended backing-pump speed | >1,300 L/min |
| Cooling | Water, 3 L/min, 15–35 °C, 0.3–0.4 MPa |
| Inlet-flange degassing temperature | <120 °C |
| Enclosure | IP54 |
| Nitrogen purge | 50 ±10 sccm through KF10 port |
| Approximate weight | 84 kg in the source record; current listed inventory includes an 87 kg MS version |
Confirm exact suffix/version, inlet flange, controller, cables, TMS, purge, cooling, interface and backing pump. Mass and gas-speed data vary by MTP-3201 variant.
Use engineered lifting, rigid mounting and interlocked backing, cooling, rotor-speed, purge and vent functions.
